1 Applied Optics Beijing Area Major Laboratory, Department of Physics, Beijing Normal University, Beijing 100875, China
2 Institute of Laser Engineering, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China
3 Key Laboratory of Trans-scale Laser Manufacturing Technology, Beijing University of Technology, Ministry of Education, Beijing 100124, China
4 Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
5 Shenzhen Engineering Research Center for Novel Electronic Information Materials and Devices, Southern University of Science and Technology, Shenzhen 518055, China